This portion of the technological and industrial statistics site is devoted to developing a database of current literature on technological statistics which is focused mainly on semiconductor manufacturing at this point. The database will be updated and will continue to grow and expand.

To find an article you should go to the breakdown by topics and select a topic. Selecting a topic will give a list of titles from which a list of abstracts can also be accessed.

Instructions: Click on the topic of interest to get a list of titles of articles on that topic. From that list you can click on abstracts for a list of the abstracts.

1. [General Reviews of Semiconductor Statistics]
2. [Process control]
   • SPC (control by monitoring without adjustment)
     • X bar and R charts
     • Shewhart charts
     • Cusum charts
     • Model Based or Regression control charts
     • Multivariate methods
       • Hotelling's T²
       • Orthogonal Prinicipal Components
   • APC (advanced which means adjustment)
     • [ EPC concepts (engineering) -- Feed forward and feedback control]
     • Tuners(slope and offset)
     • [Run to run control]
     • [EWMA control]
     • [ Multistage control systems]
3. [Design of experiments (DOE)/Process modeling]
   • RSM or regression
   • 'Corner' DOE
     • Factorials
     • Box-Behnken
     • Plackett-Burman
   • Space Filling DOE
     • Uniform
     • Latin Hypercube Sampling
   • [Optimization]
   • [Modeling Uniformity]
   • [Multivariate models]
     • Use of covariance and correlation models
     • Principal Component Analysis
4. [Alternate family of modeling/control methodologies]
   • [Neural Networks]
   • [Fuzzy Logic]
   • [Expert Systems]
   • [Genetic Algorithms]
5. [DFM/Sensitivity Analysis]
6. [Degradation/Life Testing/Reliability]
7. [Fault/Defect analysis]
   • [Spatial metrics]
   • [Detection of Clustering]
   • [ Sampling Plans for Testing/Defect Density estimation]
8. [Statistical Metrology]
9. [Computer programming applications]
10. [Kalman filtering]
11. [Circuit design issues]
12. [Yield modeling]
13. [Study of noise or variation]
14. [Product/batch flow]

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Go to the author's homepage: Joel Fenner.