Topics in Technological Statistics: Fault/Defect Analysis

Fault/Defect Analysis

Click here to go to a list of abstracts for these articles.

Sharad Saxena and Amy Unruh, "Diagnosis of Semiconductor Manufacturing Equipment and Processes", IEEE Transactions on Semiconductor Manufacturing, Vol. 7, No. 2, May 1994, pp. 220-232.
D. White, G.G. Barna, S.W. Butler, B. Wise, and N. Gallagher, "Methodology for Robust and Sensitive Fault Detection", Electrochemical Society Proceedings, Vol. 97-9, pp. 55-63.
Gary S. May and Costas J. Spanos, "Automated Malfunction Diagnosis of Semiconductor Fabrication Equipment: A Plasma Etch Application", IEEE Transactions on Semiconductor Manufacturing, Vol. 6, No. 1, February 1993, pp. 28-40.
Ulrich Kaempf "The Binomial Test: A Simple Tool to Identify Process Problems", IEEE Transactions on Semiconductor Manufacturing, Vol. 8, No. 2, May 1995, pp. 160-166.

Spatial metrics

Martha M. Gardner, Jye-Chyi Lu, Ronald S. Gyurcsik, Jimmie J. Wortman, Brian Hornung, Holger H. Heinisch, Eric A. Rying, Suraj Rao, Joseph C. Davis, and Purnendu K. Mozumder "Equipment Fault Detection Using Spatial Signatures." IEEE Transactions on Components, Hybrids, and Manufacturing, Part C: Manufacturing October, 1997
John K. Kibarian and Andrzej J. Strojwas, "Using Spatial Information to Analyze Correlations Between Test Structure Data", IEEE Transactions on Semiconductor Manufacturing, Vol. 4, No. 3, August 1991, pp. 219-225.
John K. Kibarian and Andrzej J. Strojwas, "IC Manufacturing Dianosis Based on Statistical Analysis Techniques", IEEE Transactions on Components, Hybrids, and Manufacturing Technology, Vol. 15, No. 3, June 1992, pp. 317-321.

Detection of Clustering

Sean P. Cunningham and Scott MacKinnon, "Statistical Methods for Visual Defect Metrology", IEEE Transactions on Semiconductor Manufacturing, Vol. 11, No. 1, February 1998, pp. 48-53.
David J. Friedman, Mark H. Hansen, Vijayan N. Nair, and David A. James, "Model Free Estimation of Defect Clustering in Integrated Circuit Fabrication", IEEE Transactions on Semiconductor Manufacturing, Vol. 10, No. 3, August 1997, pp. 344-359.
David J. Friedman and Susan L. Albin "Clustered Defects in IC Fabrication: Impact on Process Control Charts" IEEE Transactions on Semiconductor Manufacturing Vol. 4, No. 1, February 1991, pp. 36-42

Sampling Plans for Testing/Defect Density estimation

Leon L. Pesotchinsky and Zinovy Fichtenholz, "Comparison of Two Wafer Inspection Methods for Particle Monitoring in Semiconductor Manufacturing", IEEE Transactions on Semiconductor Manufacturing, Vol. 1, No. 1, February 1998, pp. 16-22.
Raman K. Nurani, Ram Akella, and Andrzej J. Strojwas, "In-Line Defect Sampling Methodolgy in Yield Management: An Integrated Framework", IEEE Transactions on Semiconductor Manufacturing, Vol. 9, No. 4, November 1996, pp. 506-518.
Arye Shapiro, "Automatic Classification of Wafer Defects: Status and Industry Needs", IEEE Transactions on Components, Hybrids, Packaging, and Manufacturing Technology--Part C, Vol. 20, No. 2, April 1997, pp. 164-167.

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