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• Use of Influence Diagrams and Neural Networks in Modeling Semiconductor Manufacturing Processes Nadi, et. al.

  No abstract available.

• A Genetic Algorithm for Low Variance Control in Semiconductor Device Manufacturing: Some Early Results Rietman and Frye

  -Bell Labs -neural networks process model -key aspect of paper is finding optimal by using genetic algorithm (borrowed from genetics) where generations are produced by randomly reproducing from the more æfit' members of the solution space more often and using mutations to evolve the best recipe -allowed a lower variance recipe in this example -weird but good example of borrowing from other applications -motivation for genetic algorithm is the size of the process space; reduces search to focus on more fit members while not omitting others completely

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